Based on flexible polymer films with the tracks of swift heavy ions can be created by different nano-and microelectronic devices:

• temperature, pressure, humidity, magnetic field and light radiation sensors
• microelectrotecnical devices (microtransformer, microcapacitor etc.)
• integrated microcircuits on a flexible basis
• advanced storage information systems

Development of scientific-technical principles and creation of "flexible electronics" is one of the most actual problems of modern materials science. This problem is relevant in concern with development of novel technological approaches of creation nano- and microscale electronic elements and sensors with advanced characteristics based on nanoporous flexible polymer films. These elements can be used in functional micro-, opto- and nanoelectronics devices, as well as in automo-tive and aerospace industries. Swift heavy ion track technology is prospective to achieve these goals.

The first experiments had shown perceptivity using of porous structures filled with fullerite as a sensitive element of temperature and pressure sensors.

Working element of the sensor can be a polymer film with deposited fullerite (С₆₀) in pores.

Temperature sensors based on polymer films PET with с C₆₀.

Pressure sensors based on polymer films PI with C₆₀.

Using the swift heavy ion tracks technology, created the first prototypes of microinductors, microtransformers and microcapacitors, based flexible films (polyimide (PI)) with the etched ion tracks, which were filled with pure metals by non-contact deposition technology (ELD) through a special mask.

Fig.1 – Microinductor.

Fig.2 – Microtransformer.

Fig.3 – Microcapacitor.

Field of application:
Car navigation systems, onboard equipment, advanced information storage systems, integrated microcircuits on a flexible basis.

Unique Features:
Design elements of electrical circuits on a flexible substrate enables their use on the figurine and a moving surface with a simultaneous decrease in weight and size parameters. Used to create the ion-track technology has reduced the number of manufacturing operations and to simplify their comparison with existing methods of obtaining flexible electrical and microelectronic devices.

The main technical characteristics:

• A coupling factor of the microtransformer is about 90 %;
• Q-factor of the microinductor is ~7 at operating frequencies around 0.5 GHz;
• Capacitance of the microcapacitor is in the range 0.5-0.6 pF at frequencies up to 1 GHz.

Filed two patent applications in Republic of Belarus.